SURFACE LAYER ANALYSES OF (Pb, La)TiO_3 THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING

摘要

The surface analyses of the (Pb, La)TiO_3 (PLT) thin films were carried out through X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) and atomic force microscopy (AFM). The results show that the titanium atoms exist mainly in the forms of TiO and PbTiO_3 in the near surface region, and the lead atoms exist in the form of PbTiO_3 near the surface and in the "bulk" of the films, and the root-mean-square (rms) and the average surface roughnesses of the film after annealing are 2.58 and 2.04nm respectively.