RF MAGNETRON SPUTTERING EPITAXIALLY GROWN (Pb,La)TiO_3 THIN FILMS ON (0001) A1_2O_3 AND (001) SrTiO_3 FOR NONLINEAR OPTICAL APPLICATIONS

摘要

Ferroelectrics are known to be excellent materials for nonlinear optics. Miniaturization of circuits using these materials requires an optimization of structural and morphological properties of thin films, to minimize optical losses. The first condition is the use of epitaxially grown thin films. The second one is the optimization of the morphological properties, in particular the roughness at the air/film and film/substrate interfaces must be the lowest possible.The aim of this work is to study the effect of the deposition atmosphere on these properties for PLT thin films grown on (0001) Al_2O_3 and (001) SrTiO_3.