Orientation Dependent Dielectric Characteristics of Nanocrystalline Pb(Zr_xTi_(1-x))O_3 Films with Inter Digital Electrodes

摘要

Crystal structure and dielectric properties of nanocrystalline Pb(Zr_xTi_(1-x))O_3 films were studied. Intensity of Raman mode E(ILO) was increased and peak around ～580 cm~(-1) became symmetric and strong (110) crystal plane reflection was observed as the thickness of the films increased from 150 nm to 500 nm. Curie-temperature was found to decrease from ～370℃ to ～345℃ as the orientation changed from tetragonal to trigonal. Dielectric constant was found to be maximized and loss angle minimized for single phase oriented films, while phase co-existence was found to increase loss angle values, and bimodal dielectric maxima were found.