Actuator has electrode arrangement, which comprises two electrodes, and electrode arrangement which is formed as inter-digital electrode and electrodes are formed as engaged inter-digital electrode lines deformable commonly with dielectric

摘要

The actuator (1) has an electrode arrangement, which comprises two electrodes. The electrode arrangement is formed as inter-digital electrode (4) and the electrodes are formed as engaged inter-digital electrode lines (5,6) deformable commonly with a dielectric. Electrode fingers (9,10) of the inter-digital electrode lines are arranged alternatively in engaging manner. An independent claim is included for a method for manufacturing an actuator.