Geometrical structuring or cutting of dielectric elastomer actuator comprising two electrodes and elastically deformable dielectric layer, comprises e.g. irradiating electrodes with laser beam for removing material of one of electrodes

摘要

Geometrical structuring or cutting of dielectric elastomer actuator comprising at least two layer-shaped electrodes and an elastically deformable dielectric layer, comprises irradiating the electrodes with a laser beam having a wavelength which is absorbed by the electrode material, and not absorbed or less absorbed by the material of the dielectric layer such that at least the material of at least one of the electrodes is removed in exposure region of laser beam focal spot, and moving the respective elastomer actuator and the focal spot of the laser beam in two relative dimensions. Geometrical structuring or cutting of dielectric elastomer actuator comprising at least two elastically deformable layer-shaped electrodes and an elastically deformable dielectric layer which is connected with the electrodes in a planar manner, and is arranged between the electrodes, comprises irradiating the electrodes with a laser beam having a wavelength which is absorbed by the electrode material, and not absorbed or less absorbed by the material of the dielectric layer such that at least the material of at least one of the electrodes is removed in exposure region of laser beam focal spot, and moving the respective elastomer actuator and the focal spot of the laser beam in two relative dimensions.