A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems [Review]

摘要

Microelectromechanical systems (MEMS) technologies are evolving at a rapid rate with increasing activity in the design, fabrication, and commercialization of a wide variety of microscale systems and devices. The importance of accurate mechanical property measurement for successful design was realized early on in the development of this field. Consequently, there exist many different techniques to measure quantities such as the Young's modulus (E), yield strength (sigmaY), fracture strength (sigma(F)), residual stress (sigma(R)), and residual stress gradient (delsigmaR) of microscale structures and materials. We review and critically compare several of the important techniques including the microtension test, axisymmetric plate bend test, microbeam bend test, M-test, wafer curvature measurements, dynamic (resonant) tests, fabrication of passive strain sensors, and Raman spectroscopy. We discuss the characteristics of typical test structures, and the common sources of structure-related errors in measurement. A rational approach for the selection of test techniques for the design of microsystems is suggested. [References: 86]