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机译:基层厚度对CVD Si{sub}3N{sub}4叠栅电介质可靠性的影响
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机译:Low thermal-budget ultrathin NH{sub}3-annealed atomic-layer-deposited Si-nitride/SiO{sub}2 stack gate dielectrics with excellent reliability
机译:Effect of deuterium postmetal annealing on the reliability characteristics of an atomic-layer-deposited HfO2/SiO2 stack gate dielectrics
机译:Reliability of Multiple-Layer Stacked Gate-All-Around Poly-Si Nanosheet Channel Ferroelectric HfxZr1-xO2FETs With NH3 Plasma Treatment
机译:Thermal processing impact on the integrity of HfO2-based high-k gate dielectrics
机译:Effects of thermal annealing on La2O3 gate dielectric of InGaZnO thin-film transistor