Sealing Method of Dry-Etched AlAs/GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers

M.Creusen; F.D.Bruyn

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Sealing Method of Dry-Etched AlAs/GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers

机译：垂直腔表面发射激光器中干刻AlAs / GaAs顶镜的密封方法

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A versatile sealing process for AlAs layers ispresented. This sealing prevents the AlAs layers of AlAs/GaAstop distributed Bragg reflectors from further undesired oxidationduring the wet oxidation of the AlAs current constriction layersin vertical cavity surface emitting lasers. This method has beensuccessfully applied to protect the etched pillars in top mirrorsalthough those pillars were plasma dry etched.

机译：提出了用于AlAs层的通用密封工艺。这种密封防止了在垂直腔表面发射激光器中，AlAs电流压缩层的湿式氧化过程中，AlAs / GaAstop分布的布拉格反射器的AlAs层进一步受到不希望的氧化。尽管已经对这些柱进行了等离子干法蚀刻，但是该方法已成功应用于保护顶部镜面中的蚀刻柱。

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《Electrochemical and solid-state letters》 |1999年第2期|共3页
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M.Creusen; F.D.Bruyn;
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1. Sealing Method of Dry-Etched AlAs/GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers [J] . M.Creusen, F.D.Bruyn Electrochemical and solid-state letters . 1999,第2期

机译：垂直腔表面发射激光器中干刻AlAs / GaAs顶镜的密封方法
2. 1.3-/spl mu/m Vertical-cavity surface-emitting lasers with double-bonded GaAs-AlAs Bragg mirrors [J] . Qian Y., Zhu Z.H. IEEE Photonics Technology Letters . 1997,第1期

机译：1.3- / spl mu / m垂直腔面发射激光器，带有双键GaAs-AlAs布拉格反射镜
3. CW operation of monolithic arrays of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors [J] . Donnelly J.P., Goodhue W.D. IEEE Photonics Technology Letters . 1993,第10期

机译：具有干刻垂直面和抛物线偏转镜的表面发射AlGaAs二极管激光器单片阵列的CW操作
4. Vertical-cavity surface-emitting lasers fabricated using a sealing of AlAs against wet oxidation [C] . Dae H. Lim, Chonbuk National Univ., Chonju, Conference on vertical-cavity surface-emitting lasers . 1998

机译：垂直腔表面发射激光器，采用AlAs密封材料进行抗湿氧化处理
5. Development of Epitaxial Strategies towards the Growth of Novel Semiconductor Saturable Absorber Mirrors (SESAMs) for Passively Mode-Locked Optically Pumped Vertical-External-Cavity Surface-Emitting Lasers (VECSELs) [D] . Addamane, Sadhvikas J. 2017

机译：外延战略的发展，以发展用于无源锁模光泵浦垂直外腔表面发射激光器（VECSEL）的新型半导体可饱和吸收镜（SESAM）
6. Delay-Differential-Equation Modeling of Mode-Locked Vertical-External-Cavity Surface-Emitting Lasers in Different Cavity Configurations [O] . Eugene A. Avrutin, Krassimir Panajotov 2019

机译：不同腔配置中锁模垂直外腔面发射激光器的时滞-微分方程建模
7. Sealing method of dry etched AlAs/GaAs top mirrors in vertical cavity surface emitting lasers [O] . Creusen, MP Martin, Bruyn, de, F, Karouta, F Fouad, 1999

机译：垂直腔面发射激光器中干法刻蚀AlAs / GaAs顶镜的密封方法
8. Hydrogen implanted 1.3 (micro)m vertical cavity surface-emitting lasers with dielectric and wafer-boned GaAs/AlAs mirrors [R] . Qian, Y. , Zhu, Z. H. , Lo, Y. H. , 1997

机译：氢注入1.3（微米）垂直腔表面发射激光器，带有电介质和晶片键合Gaas / alas反射镜

Sealing Method of Dry-Etched AlAs/GaAs Top Mirrors in Vertical Cavity Surface Emitting Lasers

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