Process specification language for management of MEMS device development - a step towards standardisation

摘要

The micro-electro-mechanical systems (MEMS) field has transferred many products from emergent to established technologies in the commercial world. However, many products remain under development for significant lengths of time, facing various challenges along the way. One of the most critical challenges is the lack of standardised terminology for process specification. This paper provides a foundation for formally describing the set of activities related to managing the manufacturing processes used by the MEMS community. First, we develop new taxonomic levels of abstraction for MEMS processes. We then use logic foundations provided in international standard ISO-18621-1 to develop a methodology that allows designers and product developers to remove ambiguities and misconceptions when exchanging information about MEMS manufacturing processes. A case study is presented where our methodology is applied to generate Extensive Markup Language (XML) code to capture the processes' structure and critical information.