THE ELECTROMECHANICAL PROPERTIES OF HIGHLY [100] ORIENTED [Pb(Zr_(0.52)Ti_(0.48))O_3, PZT] THIN FILMS

摘要

Lead zirconate titanate [Pb(Zr_(0.52)Ti_(0.48))O_3, PZT] thin films were deposited on Pt (111)/Ti/SiO_2/Si and Pt (200)/Ti/SiO_2/Si substrates by sol-gel method. Pyrolysis temperature and time were used to control the orientation of the thin films. A PbO buffer layer was also used to enhance the growth of (100)/(001) orientation. Poling highly (100) oriented PZT 52/48 thin films deposited on Pt (111) led to cracking and/or incomplete poling as a consequence of the additional residual stresses introduced by the a to c domain orientation switching. These problems of cracking and incomplete poling did not occur for the (100)/(001)-oriented PZT films deposited on the Pt (200), which possess high piezoelectric coefficients with maximum e_(31.f) and d_(33.f) of -13.9 + - 4C/m~2 and approx 80 + - 25 pC/N, respectively. The elastic and electromechanical properties were measured using nanoindentation for films with different texture and compared with data obtained using a flexural method.