Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures

摘要

For a super high precision MEMS sensor with the comb capacitor structure, the fringe effect of capacitors can not be neglected. In this paper, directing at the comb capacitor structure with slot holes, the effects of the non-overlap parts of comb capacitor, the distance between two slot holes in comb electrodes and slot depth aspect ratio on sensing capacitance are simulated by 3D finite element method of ANSOFT Maxwell software. The results show that when the width H and thickness t of sensing electrode plate are fixed, the fringe effect becomes larger for a smaller length L. The fringe effect is very small as non-overlap length is between 100 pm and 180 μm for 500 μm