Influence of Silicon Crystallographic Orientation on Mechanical Properties of MEMS Accelerometers

摘要

The influence of silicon crystallographic orientations (100), (110), (111) on the general properties of micromechanical (MEMS) accelerometers under the effect of operating temperatures is studied. AN SYS software was used to develop MEMS linear and pendulum accelerometers. Dependencies of self-resonant frequencies and scale factors on ambient temperature at different orientations of silicon structure have been determined.