首页> 外国专利> METHOD FOR TEXTURING A SILICON SURFACE OF ANY CRYSTALLOGRAPHIC ORIENTATION USING AN ISOTROPIC ETCH AND PHOTOLITHOGRAPHY AND SILICON CRYSTALS MADE THEREOF

METHOD FOR TEXTURING A SILICON SURFACE OF ANY CRYSTALLOGRAPHIC ORIENTATION USING AN ISOTROPIC ETCH AND PHOTOLITHOGRAPHY AND SILICON CRYSTALS MADE THEREOF

机译:利用各向同性刻蚀和照相照相术对任何晶向的硅表面进行纹理化的方法及其所制成的硅晶体

摘要

In this process for etching a flat dendritic silicon crystal in order to use it as a photovoltaic cell, a predetermined configuration of etching-resistant material is applied to a surface 111 of the silicon crystal, the configuration covering substantially the entire surface 111, and the surface 111 is etched by means of an isotropic etching material until the etching material reveals, by undermining, the configuration of the etching-resistant material substantially completely, thereby forming a set of spikes with sloping sides on the silicon crystal, the isotropic etching material and the configuration cooperating in such a way that the sloping sides have a slope which traps substantially in the interior of the silicon crystal all the light striking the silicon crystal.
机译:在该用于蚀刻平坦的树枝状硅晶体以便用作光伏电池的工艺中,将预定的抗蚀刻材料构型施加到硅晶体的表面111,该构型基本覆盖整个表面111,并且借助于各向同性蚀刻材料蚀刻表面111,直到该蚀刻材料通过破坏而基本完全暴露出抗蚀刻材料的构造,从而在硅晶体,各向同性蚀刻材料上形成一组带有倾斜边的尖峰。该配置以这样的方式协作,使得倾斜的侧面具有一个倾斜,该倾斜基本上将所有入射到硅晶体上的光捕获在硅晶体的内部。

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