MEMS accelerometer with mechanically separated test mass

摘要

PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electromechanical System) accelerometer designed to reduce an error in an accelerometer output. A MEMS accelerometer includes a test mass 101 capable of moving along at least two vertical axes and at least one measuring structure. The test mass is mechanically coupled to the measurement structure along the sense axis of the measurement structure so that the movement of the test mass along the sense axis moves the moving parts of the measurement structure and is perpendicular to the sense axis of the measurement structure. Separated from the measurement structure along one or more axes, the movement of the test mass perpendicular to the sense axis of the measurement structure does not move the moving parts of the measurement structure. [Selection diagram] Fig. 1