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MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a SingleAxis Accelerometer

机译：mEmslab：用于制造，封装和测试singleaxis加速度计的实用mEms课程

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Ronald Grundbacher; Jochen E. Hoetzel; Christofer Hierold; Senior Member;
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年度 2014
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1. MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a Single-Axis Accelerometer [J] . Grundbacher R., Hoetzel J. E., Hierold C. IEEE Transactions on Education . 2009,第1期

机译：MEMSlab：用于制造，包装和测试单轴加速度计的实用MEMS课程
2. Design, fabrication, testing and packaging of a silicon micromachined radio frequency microelectromechanical series (RF MEMS) switch [J] . M S GIRIDHAR, ASHWINI JAMBHALIKAR, JIJU JOHN, Sadhana . 2013,第2期

机译：硅微加工射频微机电系列（RF MEMS）开关的设计，制造，测试和封装
3. Design, fabrication, testing and packaging of a silicon micromachined radio frequency microelectromechanical series (RF MEMS) switch [J] . M. S. GIRIDHAR, ASHWINI JAMBHALIKAR, JIJU JOHN, Sadhana: Academy Proceedings in Engineering Science . 2013,第2期

机译：硅微加工射频微机电系列（RF MEMS）开关的设计，制造，测试和封装
4. Design and fabrication of self-packaged, flexible MEMS accelerometer [C] . M. S. Mahmood, Z. Celik-Butler, D. P. Butler IEEE Sensors . 2016

机译：设计和制造自我包装，柔性MEMS加速度计
5. Design and Fabrication of Self-Packaged, Flexible MEMS Accelerometer and Aluminum Nitride Tactile Sensors [D] . Mahmood, Md. Sohel. 2018

机译：自包装，柔性MEMS加速度计和氮化铝触觉传感器的设计与制造
6. A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers [O] . Yurong He, Chaowei Si, Guowei Han, 2021

机译：一种基于玻璃 - 硅复合晶片的电容MEMS加速度计的新型制造方法
7. MEMS Hermetic Packaging for Extremely Sensitive Accelerometers with In-Package Pressure Sensing Solution [O] . Zhang Yuxi 2016

机译：采用封装内压力传感解决方案的MEMS密封封装，用于极其灵敏的加速度计

MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a SingleAxis Accelerometer

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