Effect of nitrogen pressure and substrate bias voltage on the properties of Al-Cr-B-N coatings deposited using cathodic arc evaporation

摘要

Cathodic arc evaporation deposition method was applied to forming Al-Cr-B-N coatings. The effect of nitrogen pressure (p(N2)) and substrate bias voltage (U-B) on the properties of the coatings synthesized using Al50Cr30Br20 cathode was investigated. The chemical and phase composition of the coatings, their surface morphology together with the mechanical, tribological and anti-corrosion properties were investigated.