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Influence of microstructure on the electrochemical performance of tin-doped indium oxide film electrodes

机译:微观结构对掺锡氧化铟薄膜电极电化学性能的影响

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The effect of the microstructure of tin-doped indium oxide (ITO) films on their electrochemical performance was studied using three redok probes, tris(2,2'-bipyridyl ruthenium(II) chloride (Ru(bpy)(3)(2+/3+)), ferrocyanide (Fe-(CN)(6)(4-/3-)), and ferrocenemethanol (FcCH(2)OH(0/+)). ITO films were deposited using dc magnetron sputtering under a variety of conditions that resulted in films having different degrees of crystallinity, crystallographic texture, sheet resistance, surface roughness, and percent tin. It was found that the electron transfer for all three redox probes. used in this study was more efficient at polycrystalline films than at amorphous M films. This effect is more pronounced at faster scan, rates. The crystallographic texture of the ITO films, surface roughness, and a change in sheet resistance from 7.9 to 13.7 Omega/rectangle did not have an effect on electron-transfer kinetics. ITO films deposited using a 1 wt% SnO2 target and having sheet resistance comparable to films deposited using a 10 wt% SnO2 target had dramatically different microstructure from the films with, higher weight percent Sn and were shown to perform poorly when used as electrode materials. We believe that the dramatic differences in electron-transfer kinetics observed at the various ITO films can be attributed to either the different density of defect sites along the grain boundaries or defect sites caused by substitutional Sn in the film. [References: 31]
机译:使用三种Redok探针氯化三(2,2'-联吡啶钌(II)(Ru(bpy)(3)(2+))研究了掺杂锡的氧化铟(ITO)膜的微观结构对其电化学性能的影响/ 3 +)),亚铁氰化物(Fe-(CN)(6)(4- / 3-))和二茂铁甲醇(FcCH(2)OH(0 / +))。使用dc磁控溅射在以下条件下沉积ITO膜各种条件导致薄膜具有不同程度的结晶度,晶体织构,薄层电阻,表面粗糙度和锡百分比,发现本研究中使用的所有三种氧化还原探针的电子转移效率都比多晶薄膜高。在非晶态M薄膜上,这种效应在更快的扫描速度和速率下更加明显; ITO薄膜的晶体学纹理,表面粗糙度以及薄层电阻从7.9到13.7Ω/矩形的变化对电子传输动力学没有影响。使用1 wt%的SnO2靶沉积的ITO薄膜,其薄层电阻可与使用10%(重量)SnO2靶沉积的薄膜具有与Sn(重量百分比)较高的薄膜显着不同的微观结构,当用作电极材料时,其性能较差。我们认为,在各种ITO膜上观察到的电子传输动力学的显着差异可归因于沿晶界的缺陷部位密度不同或由膜中置换Sn引起的缺陷部位。 [参考:31]

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