Nb doped SnO{sub}2 transparent conductive oxide films for analog type touch panels

摘要

We have studied Nb doped SnO{sub}2 transparent conductive film for analog type touch panel. An analog type touch panel does not necessitate the etching of transparent electrode. Therefore, chemically stable SnO{sub}2 film can be applied for its electrode. Nb doped SnO{sub}2 film were made under conditions of deposition temperature at 200°C or 300°C, anneal temperature of 300°C or 400°C by r.f. magnetron sputtering. Resisitivities ranging between 7×10{sup}(-3)～3×10{sup}(-2) Ωcm and transmittance of more than 90% at 550nm were obtained. Further it was found that the mechanical properties such as abrasion resistance, adhesion strength and hardness are superior to those of ITO film.