TRANSPARENT CONDUCTIVE FILM FOR TRANSPARENT TOUCH PANEL, TRANSPARENT TOUCH PANEL AND MANUFACTURE OF TRANSPARENT CONDUCTIVE FILM FOR TRANSPARENT TOUCH PANEL

摘要

PROBLEM TO BE SOLVED: To enable stable and light touch input by defining arithmetic mean roughness in the surface shape of a transparent conductive film as a value in a specified range and defining square root mean roughness as a value in a specified range. ;SOLUTION: Metallic oxide as an N type semiconductor to be represented by ATO(antimony oxide/tin oxide), FTO(tin oxide/fluorodope), ITO(indium oxide/tin oxide), FATO(antimony oxide/tin oxide/fluorodope) is listed as the metallic oxide to constitute the transparent conductive film 1. Especially, the ITO is suitable since the transparent conductive film 1 itself is not colored and with excellent permeability. The transparent conductive film 1 is constituted so that the arithmetic average roughness(Ra) in the surface shape is 0.4 nmRa4.0 nm and the square root mean roughness(Rms) in the surface shape is 0.6 nmRms3.0 nm. The transparent conductive film 1 becomes the one on which assembly of crystal grains are closely arranged and with excellent smoothness by constituting it as such.;COPYRIGHT: (C)2000,JPO