New Method for Torque Magnetometry Using a Commercially Available Membrane-Type Surface Stress Sensor

摘要

We present a new method for torque magnetometry by using a commercially available membrane-type surface stress sensor (MSS). This sensor has a silicon membrane supported by four beams in which piezoresistive paths are integrated. Although originally developed as a gas sensor, it can be used for torque measurement by modifying its on-chip aluminum interconnections. We demonstrate the magnetic-torque measurement of submillimeter-sized crystals at low temperature and in strong magnetic fields. This MSS can observe de-Haas -van-Alphen oscillation, which confirms that it can be an alternative tool for self-sensitive microcantilevers.