Membrane-type surface stress sensor having immobilized antibody or antigen, manufacturing method thereof, and immunoassay method using the same

摘要

A silicon thin film on which an antibody or antigen is immobilized is supported at a plurality of points by a support including a piezoresistive element and deformation of the silicon thin film caused by binding of the antibody or antigen to an antigen or antibody in the sample solution Is detected by a piezoresistive element so as to detect the binding between the antigen and the antibody or quantify the amount of binding thereof.