磁导调制型时栅位移传感器测量方法研究

摘要

Utilizing the principle of time and space conversion theory,Time grating can realize high precision meas-urement,which has been used in control system for high precision rotary table.The rotor and stator of Time grating has windings,and the windings of rotor need slip ring.In order to abolish the slip ring,reduce the cost and improve the ability of anti-jamming,the paper represents a new method to generate traveling wave that using standing wave which is modulated by permeance,a new structure is presented to separate the magnetic paths,and designs a new type of Time grating without windings in rotor. Through the simulation,the parameters of sensor are optimized,and the amplitude of simulation results varies below 6.1%.In the end,the new sensor is calibrated by Grating,the meas-urement accuracy of the sensor is between -2.7″and +2.2″.%时栅位移传感器采用时空坐标转换理论，可在低加工精度条件下实现角位移的高精度测量，现已应用于高精度数控转台控制系统中。原有的场式时栅位移传感器借鉴电机结构，通过转子线圈感应旋转磁场产生电行波，再通过滑环引出。为了消除滑环结构，进一步降低成本、提高传感器抗干扰能力，通过磁导调制方法产生两路驻波并合成电行波，采用两路驻波磁路分离式结构，设计去除转子绕线的磁导调制型时栅位移传感器。利用电磁仿真软件对传感器的各项参数进行仿真优化，传感器仿真电行波幅值变化6.1％；采用光栅进行精度标定实验，测量精度达到-2.7″~＋2.2″。