基于磁导调制的直线式时栅位移传感器∗

摘要

In order to meet the demand of precise displacement measurement in the harsh environment, solve the problem that current measuring methods are difficult to balance the wide measuring range and measuring precision, and overcome the disadvantages of manufacturing difficulty due to small grating pitch,a new method,coupling two standing waves to electrical traveling wave based on permeability modulation,was proposed and a novel linear time grating displacement sensor was designed. According to the principle of sensor measurement which was derived,the basic structure of sensor was designed. The 3D magnetic field simulation software Ansoft Maxwell is adopted to build a simulation model of the sensor. Using fast Fourier transform( FFT) to analyze the error of simulation results and trace to the source. According to the analysis results,the model structure was optimized and the simulation results are verified.According to the optimization model,The sensor was manufactured and the experimental platform was built to verify the experimental results. The experiment results show that the measurement accuracy reaches 600 nm in the range of 200 mm. The sensor produces easily and cost low,which has important practical value in practical engineering.%为了满足恶劣环境下精密位移测量的需求,解决现有测量方法在大量程和高精度之间无法兼顾的难题,克服小栅距造成加工难度大的缺点,提出一种基于磁导调制的驻波合成行波的新方法,研究一种新型直线式时栅位移传感器。通过对传感器测量原理的理论推导,设计了传感器的基本结构,应用三维磁场仿真软件Ansoft Maxwell对传感器进行建模与仿真,采用快速傅里叶变换( FFT)对仿真结果进行误差分析与溯源,根据分析结果对模型结构优化并进行仿真实验验证；根据优化模型制作传感器实物并搭建实验平台进行实验验证。实验结果显示：在200 mm测量范围内,测量精度达±600 nm,且传感器制造简易,成本低廉,在实际工程中具有重要的实用价值。