Method of orientation control and experimental investigation using a liquid-drop micromanipulator

摘要

Orientation adjustment of the micro-component is the key but most difficult part of micro-assembly. In this paper, the mechanism and physical process for orientation adjustment of micro-components absorbed by a liquid-drop micromanipulator are analyzed. The transformation relationship between the orientation of micro-components and the shape of the liquid-drop micromanipulator tip is studied. The quantitative mapping relationship between the shape of the liquid-drop micromanipulator tip and the orientation of micro components is established. A method to quantitatively control the tilt and rotation of micro-components is presented, and the feasibility of the method is verified by experiment. The results show that the orientation of a micro-component absorbed by a liquid-drop micromanipulator varies with the orientation of the micromanipulator. Quantitative control of the orientation of the micro-component can be realized by changing the shape of micromanipulator tip by controlling the upward and downward movement of tungsten rods.