机译:金刚石薄膜不同生长阶段的内在应力演变
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
Univ Sci &
Technol Beijing Inst Adv Mat &
Technol Beijing 100083 Peoples R China;
CVD diamond film; Intrinsic stress; Grain boundary;
机译:金刚石薄膜不同生长阶段的内在应力演变
机译:沉积温度下纳米晶金刚石薄膜的内在应力演化
机译:在CH_4-H_2-NH_3热丝化学气相沉积系统中制备的金刚石薄膜的内在应力演化
机译:本征薄膜应力演化和IMC生长与晶须生长的相关性
机译:了解通过Volmer-Weber方法生长的多晶薄膜中的内在应力演化。
机译:掺硼金刚石薄膜中电导率和自由载流子的Drude模型分析及其内应力和应变研究
机译:聚对苯二甲酸乙二醇酯上逐渐沉积的类金刚石碳膜的形貌和化学演化:从植入过程到固有应力释放现象的结构重组