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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Studies of early stages of Mn/GaN(0001) interface formation using surface-sensitive techniques
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Studies of early stages of Mn/GaN(0001) interface formation using surface-sensitive techniques

机译:使用表面敏感技术研究Mn / GaN(0001)界面界面形成的早期阶段

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Non-doped GaN(0001) crystals are used as substrates in this study, on which Mn films are vapour deposited in situ under ultrahigh vacuum (UHV). The early stages of the Mn/GaN(0001) interface formation at room temperature are determined by means of X-ray photoelectron spectroscopy (XPS), ultraviolet photoelectron spectroscopy (UPS) and low-energy electron diffraction (LEED). The electron affinity for the already cleaned GaN(0001)-(1 x 1) surface, achieved by thermal cleaning, is 3.5 eV. The binding energy (BE) of the Ga-3d core level line shifts from 20.3 eV to 19.8 eV and the Mn-3p state from 47.6 eV to 47.2 eV upon stepwise Mn deposition due to charge transfer, e.g. Schottky barrier (SB) formation. The splitting of the Mn-2p doublet amounts to 11.2 eV and the Mn-2p(3/2) peak has a BE of 638.7 eV, these values corresponding to metallic manganese. The work function of the Mn films with the thickness of 1 nm is 3.4 eV and slightly decreases to 3.2 eV with further overlayer thickness. The SB height of the interface is determined to be 1.2 eV. The Mn films show no LEED patterns. The XPS results, generally, show the absence of any interfacial compound formation. (C) 2018 Elsevier Ltd. All rights reserved.
机译:在本研究中使用非掺杂GaN(0001)晶体作为底物,在该研究中,Mn膜在超高真空(UHV)下原位沉积的蒸气。在室温下的Mn / GaN(0001)界面形成的早期阶段通过X射线光电子能谱(XPS),紫外线光电子谱(UPS)和低能量电子衍射(LEED)测定。通过热清洗实现的已经清洁的GaN(0001) - (1×1)表面的电子亲和力为3.5eV。 GA-3D核心水平线的结合能量(BE)从20.3eV到19.8eV和47.6eV的MN-3P状态随电荷转移引起的逐步MN沉积时从47.6eV到47.2eV。肖特基障碍(SB)形成。 Mn-2P双峰的分裂量为11.2eV和Mn-2P(3/2)峰具有638.7eV,这些值对应金属锰。厚度为1nm的Mn膜的功函数是3.4eV,并且具有进一步的覆盖层厚度略微降至3.2eV。界面的SB高度被确定为1.2eV。 Mn薄膜没有显示出Leed图案。 XPS结果通常显示出没有任何界面化合物的形成。 (c)2018年elestvier有限公司保留所有权利。

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