Analysis of the metal layer thickness influence on the dispersion characteristics of acoustic waves propagating in the layered piezoelectric structure “Me/AlN/Me/diamond”

摘要

Highlights?Mass loading of two metal layers on SAW propagation in “Me/AlN/Me/diamond” has been studied.?Phase velocity changing in PLS as a function of acoustic impedance of metal layers has been investigated.?Difference in the influence of top or bottom layers on phase velocities for non-symmetrical PLS has been found.AbstractThe paper presents the results of computer simulation of the acoustic waves propagation in piezoelectric layered structures based on diamond substrate under the influence of various metal film deposition. It has been observed that the maximum phase velocity change Δv/vis achieved with an “Au/(001) AlN/Au/(100) diamond” PLS configuration. However, if the acoustic impedance of the metal layer is greater than the acoustic impedance of the substrate, an elastic wave reflection can be observed, reducing the Δv/vquantities. Obtained results may be useful in the development of resonant and sensor acous