机译:通过相位模式AFM光刻制造亚微米尺寸MOS_2薄膜晶体管的制造
State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Science Shenyang 110016 China;
State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Science Shenyang 110016 China;
State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Science Shenyang 110016 China;
State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Science Shenyang 110016 China;
State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Science Shenyang 110016 China;
Department of Electrical and Computer Engineering University of Pittsburgh Pittsburgh PA 15213 USA;
AFM lithography; MoS_2; TFT fabrication;
机译:通过相位模式AFM光刻制造亚微米尺寸MOS_2薄膜晶体管的制造
机译:使用基于AFM尖端的动态犁光刻方法在PMMA薄膜上用大半径探针制造无脊纳米槽
机译:使用弹性离子凝胶栅极电介质制造可拉伸的MoS_2薄膜晶体管
机译:用于薄膜晶体管制造的数字光刻(涉及柔性薄膜电子会议)
机译:异常光学系统的制造技术和建模:近场相移光刻和等离子体传感器
机译:基于AFM尖端的动态犁光刻技术在聚合物薄膜上制备高通量纳米级坑
机译:微纳米制造:通过相位模式AFM光刻制造亚微米尺寸的MOS2薄膜晶体管(小49/2018)