Transparent Conductive AGZO/Ag/AGZO Multilayers on PET Substrate by Roll-to-Roll Sputtering

摘要

Indium-free Al and Ga-codoped ZnO (AGZO) multilayer films with nanoscale Ag interlayer were deposited by dual target roll-to-roll RF for AGZO and DC sputtering systems for Ag at room temperature for a large scale. The thicknesses of AGZO/Ag/AGZO multilayer were optimized by changing the roll speed: 0.15/1.1/0.15 m/min for AGZO/Ag/AGZO multilayers, respectively. The optimum thicknesses of AGZO/Ag/AGZO multilayer are 9.21, 8.32 and 8.04 nm, respectively. Optimized AGZO/Ag/AGZO multilayer films showed an excellent transparency (84% at 550 nm) and a low sheet resistance (9.2 Omega/sq.) on PET substrates for opto-electronic applications. The effects of nanoscale Ag interlayer on optical and electrical properties of AGZO/Ag/AGZO multilayer films were discussed.