Micro-Electromechanical Vibrating Ring Gyroscope with Structural Mode-Matching in (100) Silicon

摘要

This paper presents a design methodology of vibrating ring gyroscope on a (100) silicon to minimize the mode mismatch in operational resonance frequencies. The fine-tuned gyroscope is designed by independently adjusting the radii and widths of support-springs in the directions of <110> and <100> to compensate the anisotropy of a (100) silicon. The extensive parametric study of designing parameters was conducted. We achieved a significant decrease in the mode mismatch which is about 6 Hz from the fabricated gyroscope. (<0.03% of 21.9 kHz resonant frequency).