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首页> 外文期刊>Crystallography reports >Structural Characterization of Si_(1-x)Ge_x Ultrathin Quantum Wells in a Si Matrix by High-Resolution X-ray Diffraction
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Structural Characterization of Si_(1-x)Ge_x Ultrathin Quantum Wells in a Si Matrix by High-Resolution X-ray Diffraction

机译:高分辨X射线衍射在Si基体中Si_(1-x)Ge_x超薄量子阱的结构表征

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摘要

The structural characteristics of silicon samples containing one and two Si_(1-x)Ge_x/Si quantum wells 1.8 to 15 nm thick were determined by high-resolution X-ray diffraction. A detailed analysis of X-ray rocking curves made it possible to reproduce the Ge-concentration profiles in the quantum wells. The diffusion of germanium (up to 20%) into interface layers was observed, with a consequent broadening of the quantum well interfaces.
机译:通过高分辨率X射线衍射测定包含1.8至15nm厚的一个和两个Si_(1-x)Ge_x / Si量子阱的硅样品的结构特征。通过对X射线摇摆曲线的详细分析,可以再现量子阱中的Ge浓度分布。观察到锗(最多20%)扩散到界面层中,从而扩大了量子阱界面。

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