Experimental investigation of the influence of excitation signal on radiation characteristics of capacitive micromachined ultrasonic transducer

摘要

CMUT based on micro-electro-mechanical systems (MEMS) technology has a broad application prospects and has become the mainstream transducer for the new generation of ultrasound imaging systems. In this paper, based on the 16-element linear CMUT array chip that has been manufactured, an experimental system was built to investigate the radiation characteristic of CMUT. The influence of the parameters such as the DC bias voltage, the amplitude and period number of the AC excitation signal on the radiation signal is analyzed comprehensively. The experimental results are consistent with the results of the simulation analysis previously obtained by using the state equation-SIMULINK model. These experimental investigation and analysis results provide effective data support and reference for further optimization of design parameters and design of imaging systems, which lay a good application foundation.