Dynamics and vibrations of particle-sensing MEMS considering thermal and electrostatic actuation

摘要

The dynamic behavior of micro-cantilevers and micro-bridges under electrostatic and thermal base actuations is investigated in this paper. To solve the equation of motion for the systems, a finite element model is presented and numerical solutions are proposed. For micro-bridge, nonlinear terms are applied in the equation of motion and influence of these terms are studied. Effect of base stiffness is also investigated. Both electrostatic and thermal base excitations are applied to the system in order to investigate the dynamic response of the system.