Conductivity and temperature coefficient of resistance of multilayered polycrystalline films

摘要

We calculate the electric conductivity and the temperature coefficient of resistance (TCR) of a multilayered film consisting of the alternating polycrystalline metal layers of different thickness and purity within the relaxation time formalism. In the case of Cr, Cu and Co-based multilayered films we perform verification of our analytical formulas and demonstrate a qualitative agreement between the theoretically calculated values of the TCR and experiment. (c) 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.