STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS

摘要

Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactive sputtering under the atmosphere of O_2 and N_2. Ni-Cr alloy was chosen as target material and copper sheets as substrate. Using SEM. Spectrophotometer and Talystep to analyze the relations between the selective characteristic and the structure, the formation and the thickness of the thin films. The aim is to obtain good solar selective thin films with high absorptance and low emittance, which is applied to flat plate solar heat collectors.