Time Efficient Evaluation of Multi-axis MEMS Gyroscope Using Three-dimensional Test Methodology

摘要

Recently, the demand for micro-electromechanical systems (MEMS) based inertial sensors has been increased due to a wide range of application in consumer electronics; however, high volume production remains a major challenge for the MEMS industry. This paper proposes a new three dimensional (3-D) test methodology for the time-efficient evaluation of multi-axis MEMS gyroscopes. A mathematical model for the proposed 3-D test method was derived based on the coordinates transformation. The 3-D test methodology was validated experimentally using three-axis MEMS gyroscope from ST Microelectronics and the results were compared with the conventional one dimensional (1-D) test method. The experimental results revealed that the measurement error between the conventional 1-D and the proposed 3-D test was less than 1%, whereas the test time was decreased three times. Finally, the error sources and limitations of the proposed 3-D test method was highlighted.