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Top-down fabricated tapered GaAs nanowires with sacrificial etching of the mask

机译:自上而下的制造锥形GaAs纳米线,掩模沉积蚀刻

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摘要

A novel fabrication method using controlled sacrificial etching of the mask is utilized to fabricate tapered vertical GaAs nanowire arrays. Experimental measurements of the absorption characteristics show that the tapered nanowires absorb over a broadband range as compared to cylindrical ones. The broadband characterization is verified by using optical modeling and results from improved coupling of the nanowires due to distinct radial HE modes being excited separately in the taper and the cylindrical part. The absorption is found to be more broadband as compared to conical nanowires studied so far.
机译:利用使用受控牺牲掩模蚀刻的新型制造方法来制造锥形垂直GaAs纳米线阵列。 吸收特性的实验测量结果表明,与圆柱形的相比,锥形纳米线在宽带范围内吸收。 通过使用光学建模验证宽带表征,并且由于纳米线的改进而导致纳米线的改进耦合而导致的径向HE模式,其模式在锥形和圆柱形部分中分开激励。 与到目前为止研究的锥形纳米线相比,发现吸收更加宽带。

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