Effects of Interdigitated Platinum Finger Geometry on Spectral Response Characteristics of Germanium Metal-Semiconductor-Metal Photodetectors

摘要

We fabricated interdigitated germanium (Ge) metal-semiconductor-metal photodetectors (MSM PDs) with interdigitated platinum (Pt) finger electrodes and investigated the effects of Pt finger width and spacing on their spectral response. An increase in the incident optical power enhances the creation of electron-hole pairs, resulting in a significant increase in photo current. Lowering of the Schottky barrier could be a main cause of the increase in both photo and dark current with increasing applied bias. The manufactured Ge MSM PDs exhibited a considerable spectral response for wavelengths in the range of 1.53-1.56 μm, corresponding to the entire C-band spectrum range. A reduction in the area fraction of the Pt finger electrode in the active region by decreasing and increasing finger width and spacing, respectively, led to an increase in illuminated active area and suppression of dark current, which was responsible for the improvement in responsivity and quantum efficiency of Ge MSM PDs.