Effect of Mesa Structure Formation on the Electrical Properties of Zinc Oxide Thin Film Transistors

摘要

ZnO based bottom-gate thin film transistor (TFT) with SiO_2 as insulating layer has been fabricated with two different structures. The effect of formation of mesa structure on the electrical characteristics of the TFTs has been studied. The formation of mesa structure of ZnO channel region can definitely result in better control over channel region and enhance value of channel mobility of ZnO TFT. As a result, by fabricating a mesa structured TFT, a better value of mobility and on-state current are achieved at low voltages. A typical saturation current of 1.85 × 10~(-7) A under a gate bias of 50 V is obtained for non mesa structure TFT while for mesa structured TFT saturation current of 5 × 10~(-5) A can be obtained at comparatively very low gate bias of 6.4 V.