We have investigated the growth of a porous thin surface film by deposition of randomly shaped clusters with different sizes over an initially flat linear substrate in (1 1) dimensions. In analogy with the ballistic deposition process, our approach results in aggregation of clusters with a porous bulk and a rough surface that obeys the Family-Vicsek dynamic scaling. The scaling exponents are calculated and found to agree with the ballistic deposition model. Moreover, the bulk porosity and its dependence on time and cluster size are also investigated. We have also studied the influence of the cluster size on the scaling exponents and the stationary porosity.
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