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Surface chemical modification induces nanometer scale electron confinement in field effect device

机译:表面化学修饰在场效应器件中引起纳米级电子约束

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摘要

Design, preparation, and study of physicochemical properties of molecular assemblies are extremely challenging multidisciplinary research fields. Understanding the elementary principles that correlate these properties with molecular level of electronic behavior will enable us to control basic properties of molecule-based compounds as well as of classical semiconductors. In particular, chemical modification of field effect sensor devices where the metal gate is replaced with organic molecular layer, projects a crucial impact upon the electrical properties of the sensor. In these cases it is important to control the effects in order to ensure that the organic gate is optimized for sensing. Here we used fully depleted silicon-on-insulator (SOI) ion sensitive field effect transistor in order to analyze the projection of surface chemical modification on electronic performance. We suggest that surface activation and the application of 3-aminopropyltrimethoxysilane on,top of the gate dielectric introduces negative charge at the Si/ Si0_2 interface or/and on top of the gate dielectric and consequently an accumulation layer that confines the electrons to the bottom of the SOI channel. The transistor gain postmodification is characteristic of volume inversion, and therefore suggests that, following modification, the channel electrons are confined' to SOI thickness of <10 nm. Finally, measurements of pH sensitivity indicate that the pH sensitivity _post-UV / O_3 treatment is maximized suggesting that the negative charge is introduced during the activation process, where the density of the negatively charged amphoteric sites maximized.
机译:分子组装的理化性质的设计,制备和研究是极富挑战性的多学科研究领域。了解将这些特性与电子行为的分子水平相关联的基本原理将使我们能够控制基于分子的化合物以及经典半导体的基本特性。特别地,其中金属栅极被有机分子层代替的场效应传感器装置的化学改性对传感器的电性能产生了至关重要的影响。在这些情况下,控制效果很重要,以确保优化有机门的传感能力。在这里,我们使用了完全耗尽的绝缘体上硅(SOI)离子敏感场效应晶体管,以分析表面化学修饰对电子性能的预测。我们建议表面活化和在栅极电介质顶部上施加3-氨基丙基三甲氧基硅烷会在Si / SiO_2界面或/和栅极电介质顶部上引入负电荷,从而在电子层的底部形成积聚层。 SOI通道。晶体管增益的后修改是体积反转的特征,因此建议修改后,将沟道电子限制在<10 nm的SOI厚度。最后,对pH敏感性的测量表明,对UV / O_3后的pH敏感性达到最大,这表明在活化过程中引入了负电荷,其中带负电荷的两性位点的密度最大。

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