首页> 外国专利> Optical nanometer scale gap sensing device based on Surface Plasmon Resonance and optical nanometer scale gap sensing method using the same

Optical nanometer scale gap sensing device based on Surface Plasmon Resonance and optical nanometer scale gap sensing method using the same

机译:基于表面等离子体共振的光学纳米尺度间隙感测装置及使用该光学纳米尺度间隙感测方法

摘要

The present invention is a nanoscale gap using surface plasmon resonance measurement device and a measurement method using the nanoscale gap between them relates to a prism (10); Transmittance of light is configured as a relatively good material to be deposited on the prism 10 in the first metal thin film 20; And the imaged object 50 and 0nm or more and spaced by a gap corresponding to several tens of nm or less, chemical stability than that of the first metal film 20 is composed of a relatively fine material of the first metal thin film 20, and depositing the first metal film 20 and the second metal film to form a metal layer having a thickness of less than 30nm 60nm with (30) is configured to include, in particular the light irradiation angle of the prism 10 the transmission of the first metal thin film 20 and to measure the gap between the second object according to the state of the imaging surface is irradiated with electromagnetic wave generated in the metal thin film 30 (50) and the second metal thin film 30 by a technical aspect, in the practical application as a surface plasmon resonance as the zoom imaging technique, the surface shape of the object on the imaging unit of nm to tens of nm nanoscale precision and a gap measuring device using the same, using the surface plasmon resonance imaging which enables It relates to a method for measuring nano-scale gap.
机译:本发明是一种利用表面等离子体共振测量装置的纳米级间隙,以及利用它们之间的纳米级间隙的测定方法,涉及一种棱镜(10)。光的透射率被配置为要沉积在第一金属薄膜20中的棱镜10上的相对较好的材料;因此,光的透射率可以设定为0。并且被成像物体50和0nm或更大并且以对应于几十nm或更小的间隙间隔,比第一金属膜20的化学稳定性由第一金属薄膜20的相对精细的材料构成并且沉积第一金属膜20和第二金属膜与(30)形成小于30nm的厚度为60nm的金属层,该第一金属膜20和第二金属膜构成为特别包括棱镜10的光照射角度和第一金属薄膜的透射率。如图20所示,并且根据技术方面,根据在金属薄膜30(50)和第二金属薄膜30中产生的电磁波照射成像面的状态来测量第二物体之间的间隙,在实际应用中作为表面等离振子共振作为变焦成像技术,使用表面等离振子resona的成像单元的表面形状在nm到数十nm的纳米级精度上,以及使用该表面的等距测量装置由于成像使得其涉及一种测量纳米级间隙的方法。

著录项

  • 公开/公告号KR101000675B1

    专利类型

  • 公开/公告日2010-12-10

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20080077463

  • 申请日2008-08-07

  • 分类号G01B11/00;G01B11/14;

  • 国家 KR

  • 入库时间 2022-08-21 17:52:53

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