Sub-nm resolution depth profiling of the chemical state and magnetic structure of thin films by a depth-resolved X-ray absorption spectroscopy technique

摘要

Development and recent progress of a depth-resolved X-ray absorption spectroscopy (XAS) technique are presented, together with future prospects. The technique has been developed by controlling the probing depth of the electron-yield XAS data, which depends on the electron emission angle. This novel technique enables us to achieve depth profiling of the magnetic structure of thin films with a sub-nm depth resolution by using X-ray magnetic circular dichroism (XMCD) in X-ray absorption, which provides quantitative information on the element-specific spin and orbital magnetic moments. The chemical state and electronic structure at the surface and interface are also investigated by depth-resolved XAS analysis. As for future prospects, a three-dimensional micro XAS technique is being developed by combining an X-ray microbeam with depth-resolved XAS. Moreover, it is expected to manipulate magnetic anisotropy by using element-specific and depth-resolved magnetic anisotropy energies obtained from the depth-resolved XMCD to design thin films and multilayers with proper elements and proper thicknesses. The observation of the spin dynamics at the interface will be also possible in future by adopting the pump-probe method.