Rotational and vibrational temperature measurements in a high-pressure cylindrical dielectric barrier discharge (C-DBD)

摘要

The rotational (T-R) and vibrational (T-v) temperatures of N-2 molecules were measured in a high-pressure cylindrical dielectric barrier discharge (C-DBD) source in Ne with trace amounts (0.02%) of N-2 and dry air excited by radio-frequency (rf) power. Both T-R and T-v of the N-2 molecules in the (CIIu)-I-3 state were determined from an emission spectroscopic analysis the 2(nd) Positive system ((CII)-I-3 -> B(3)IIg). Gas temperatures were inferred from the measured rotational temperatures. As a function of pressure, the rotational temperature is essentially constant at about 360 K in the range from 200 Torr to 600 Tort (at 30 W rf power) and increases slightly with increasing rf power at constant pressure. As one would expect, vibrational temperature measurements revealed significantly higher temperatures. The vibrational temperature decreases with pressure from 3030 K at 200 Torr to 2270 K at 600 Torr (at 30 W rf power). As a function of rf power, the vibrational temperature increases from 2520 K at 20 W to 2940 K at 60 W (at 400 Torr). Both T-R and T-v also show a dependence on the excitation frequency at the two frequencies that we studied, 400 kHz and 13.56 MHz. Adding trace amounts of air instead of N-2 to the Ne in the discharge resulted in higher T-R and T-v values and in a different pressure dependence of the rotational and vibrational temperatures.