Structure, ferroelectric and dielectric characterization of Mn-doped 0.938(Bi0.5Na0.5)TiO3-0.062BaTiO(3) thin film

摘要

Lead-free ferroelectric thin films with excellent performances are desired for environmentally friendly micro-electromechanical system (MEMS) devices. In this work, 0.938(Bi0.5Na0.5)TiO3-0.062BaTiO(3)-0.5% Mn (BNBTM) thin film with enhanced ferroelectric property was deposited on SrTiO3 (STO) single-crystal substrate via pulsed laser deposition. (La0.6Sr0.4)CoO3 (LSCO) was selected as both electrode and buffer layer due to its excellent electrical conductivity and good lattice matching with BNBTM and STO. XRD pattern showed both LSCO and BNBTM to exhibit pure perovskite structure and (100) orientation. Saturated hysteresis loop was obtained with the remnant polarization P-r of 22 mu C/cm(2) and the average coercive field E-c of 9.1 kV/mm. The excellent ferroelectric property makes it a promising candidate for environmentally friendly MEMS devices. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.