Development of a Novel High-Speed and Controllable Position Platform with a Precision XYθ Stage

摘要

An XYC-axis precision feeding system was established into a novel high-speed and controllable position platform with a precision XYθ stage that combined with motion control, system integrated engineer, image alignment, and mask aligning techniques for laser direct imaging (LDI) processes. The developed system linked a PC-based controller, multi-axis measurement and error compensation techniques reached a high stiffness, high loading capability, high speed alignment, high precision, and high positioning repeatability. This system could be used in the alignment, fabrication, and inspection equipments for the advanced lithography industries such as printed circuit boards (PCBs), wafers, touch panels, integrated circuits (ICs), light emitting diodes (LEDs), and spare parts. In addition, the primary aims of this project were to design a mechanism with X and Y axes in a coplanarity and to adopt circular arc guideways in a C axis to improve the loading capability when moving the XYC axes simultaneously. The proposed system promotes the accuracy and efficiency of the alignment and position and the international competition ability for automation equipments. In the future, the controllable position platform will widely be installed in the advanced equipments for drilling and cutting of LED ceramic substrates, inspection of wafers, drilling of PCB substrates, laser edge isolation of thin-film solar cells, scribing or surface texturing of sapphires, and other tasks.