New Generation Technology of Specimen Preparation for Transmission Electron Microscope: Application in Magnetic, Optoelectronic, and Semiconductor Devices

摘要

As a result of the high resolution, transmission electron microscope plays a decisive role on fabrication controlling and failure analyses, etc. during the minimization of device. However, if there were no high quality TEM specimen, it would yield half the result with twice the effort. In this article, we introduce a new generation technology of specimen preparation for TEM, which is the T-tool tripod polisher wedge technique, and describe the tricks of TEM specimen preparation in detail. Afterwards, we also launch the difficulty and resolved methods of TEM specimen preparation for magnetic, optoelectronic and semiconductor devices from practical application. Accordingly, the expectant results could be obtained by using corresponding TEM analytic technique.