Dependence of the ferroelectric properties of modified spin-coating-derived PZT thick films on the crystalline orientation

摘要

The effects of crystalline orientation on the ferroelectric properties of lead zirconate titanate (PZT) thick films deposited on (111)-oriented Pt/Ti/SiO2/Si substrates by using a modified spincoating method have been studied. The texture and the microstructure of the thick films were characterized by using X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis, respectively. The XRD results implied that the texture of the PZT films was sensitive to the pyrolysis conditions after spin-coating, but less dependent on the film's thickness. The texture had mainly a (111)-orientation for pyrolysis temperatures from 330 to 400 au broken vertical bar C, and changes in the (100)- orientation occurred for pyrolysis temperatures at or above 450 au broken vertical bar C after annealing at 650 au broken vertical bar C for 5 min. The formation of a preferred texture could be explained by using the intermetallic phases and the internal stress energies between the substrate and the film. The ferroelectric properties of the PZT films fabricated by using this method have been found to be enhanced as compared to those of the PZT films fabricated by using the conventional spin-coating method and to be correlated to the microstructure of the film.