Preparing and Ferroelectrical properties of PZT nanoparticle modified PZT thick film by alternately spinning technique

摘要

The present work focused on the study of preparing processes and the ferroelectric properties of a crack-free and PZT nanoparticle modified PZT thick film by alternately spinning technique. With the increase of the annealing temperature, Pr increased and Ec changed inconspicuously. When the thickness of PZT thick film increased, Ec decreased but Pr increased. For the 4μm-thick film, Ec and Pr were 23 kV/cm and 60 μC/cm~2, respectively. The results also confirmed that the alternately spinning technique not only improved the film thickness, but also solved the membrane surface roughness problem of the thick film prepared by PZT 0-3 composite sol method.