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首页> 外文期刊>Journal of the Chinese Society of Mechanical Engineers, Series C: Transactions of the Chinese Society of Mechanical Engineers >The effects of optical absorption coefficient on dislocation behaviors of grain boundary induced by femtosecond laser ablation
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The effects of optical absorption coefficient on dislocation behaviors of grain boundary induced by femtosecond laser ablation

机译:光吸收系数对飞秒激光烧蚀引起的晶界位错行为的影响

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Molecular dynamics simulations are conducted to study the influences of the optical absorption coefficient on the femtosecond laser ablation of polycrystalline materials in a nano-domain. Various parameters of laser incident energy and absorption coefficient are used to characterize the dynamical propagations and structural evolutions at the grain boundary (GB). Heterogeneous dislocation reactions induced by shock dynamics that nucleated from the solid-liquid interface and sequentially grew in target are observed. As the shock pressure penetrated through the GB, the dislocation emissions along various possible {111}<112> Shockley partials are examined via the quantitative dislocation-based analyses. The simulation results show that the large absorption coefficient produces a shallow ablation depth. Moreover, the large absorption coefficient can result in grain spallation and ejection in definite conditions, which significantly change the results of ablation yield and size distribution of the ejected clusters. The simulation results provide a better dynamic behavior characterization of how an ultra-fast laser interacts with polycrystalline materials. The presented model also embodies the notion inherent in short-pulsed laser spallation (or lift-off) techniques, and this is helpful for further investigations of the damage-free separation of various optoelectronic thin-films and heterostructures in semiconducting processes.
机译:进行分子动力学模拟以研究光吸收系数对纳米域中多晶材料飞秒激光烧蚀的影响。使用激光入射能量和吸收系数的各种参数来表征晶界(GB)处的动态传播和结构演变。观察到由冲击动力学引起的异质位错反应,该动力学从固液界面成核并在靶中依次生长。当冲击压力穿透GB时,通过基于位错的定量分析检查了沿各种可能的{111} <112> Shockley子部件的位错排放。仿真结果表明,较大的吸收系数产生较浅的烧蚀深度。而且,大的吸收系数会在一定条件下导致晶粒散裂和弹出,从而显着改变烧蚀的结果和弹出的团簇的尺寸分布。仿真结果提供了关于超快激光与多晶材料相互作用的更好的动态行为表征。提出的模型还体现了短脉冲激光剥落(或剥离)技术中固有的概念,这有助于进一步研究半导体工艺中各种光电薄膜和异质结构的无损分离。

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